Line-source e-beam crystallization of Si on silicon nitride layers
- Author(s):
Knapp, J.A. ( Sandia National Laboratories ) Picraux, S.T. ( Sandia National Laboratories ) Lee, K. ( Stanford University ) Gibbons, J.F. ( Stanford University ) Sedgwick, T.O. ( IBM Research Center ) Depp, S.W. ( IBM Research Center ) - Publication title:
- Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposia proceedings
- Ser. no.:
- 4
- Pub. Year:
- 1982
- Page(from):
- 511
- Page(to):
- 516
- Pub. info.:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006936 [0444006931]
- Language:
- English
- Call no.:
- M23500/4
- Type:
- Conference Proceedings
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