Blank Cover Image

Structural modifications of amorphized silicon surfaces following picosecond laser irradiation

Author(s):
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
177
Page(to):
182
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dislocation nucleation, growth and suppression during CW laser annealing of silicon

Rozgonyi, G.A., Baumgart, H., Phillipp, F.

North Holland
7 Conference Proceedings SURFACE RECOMBINATION VELOCITY AND RECOMBINATION LIFETIME IN IRON CONTAMINATED SILICON

Buczkowski, A., Shimura, F., Rozgonyi, G.A.

Electrochemical Society
2 Conference Proceedings Picosecond laser pulse induced damage in crystalline silicon

Merkle, K.L., Uebbing, R.H., Baumgart, H., Phillipp, F.

North Holland
8 Conference Proceedings Study of the crystalline to amorphous silicon boundary following laser induced solid phase epitaxy

Gonchond, J.P., Rozgonyi, G.A., Bois, D.

North Holland
3 Conference Proceedings HIGH-VOLTAGE ELECTRON MICROSCOPY INVESTIGATION OF SUBGRAIN BOUNDARIES IN RECRYSTALLIZED SILICON-ON-INSULATOR STRUCTURES

Baumgart, H., Phillipp, F.

Materials Research Society
9 Conference Proceedings Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime

Buczkowski, A., Rozgonyi, G.A., Shimura, F.

Electrochemical Society
4 Conference Proceedings Defect formation in cw CO2 laser annealed silicon

Baumgart, H., Phillipp, F., Leamy, H.J.

North Holland
10 Conference Proceedings Surface Modification and Ablation of Insulators Using a Tunable, Picosecond Mid-Infrared Laser

Haglund, R. F., Jr., Ermer, D. R., Lines, A. H., Papantonakis, M. R., Park, H. K., Yavas, O.

MRS - Materials Research Society
5 Conference Proceedings DIELECTRIC ISOLATION USING POROUS SILICON

Baumgart, H., Frye, R. C., Phillipp, F., Leamy, H. J.

North Holland
11 Conference Proceedings TEMPERATURE DEPENDENT AMORPHIZATION OF SILICON DURING SELF IMPLANTATION

Maszara, W.P., Rozgonyi, G.A., Simpson, L., Wortman, J.J.

Materials Research Society
6 Conference Proceedings STRUCTURAL PROPERTIES OF DIELECTRIC LAYERS FOLLOWING CO2 LASER IRRADIATION OF SOI STRUCTURES

Baumgart, H., Arnold, E., Petruzzelo, J., McGee, T. F., Frommer, M. H.

North Holland
12 Conference Proceedings INVITED: SILICON WAFER DEFECT ENGINEERING

Rozgonyi, G.A.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12