Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films

Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films

Author(s):

Roth, J.A. ( Hughes Research Laboratories )
Kokorowski, S.A. ( Hughes Research Laboratories )
Olson, G.L. ( Hughes Research Laboratories )
Hess, L.D. ( Hughes Research Laboratories )

Publication title:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

4

Pub. Year:

1982

Page(from):

169

Page(to):

176

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

Language:

English

Call no.:

M23500/4

Type:

Conference Proceedings

Details

TDL ID:	ZA00018762
Series ID:	PA00000010
Conf. info. (Name):	Materials Research Society Annual Meeting
Conf. info. (Number):	1981
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1981.11.16-1981.11.19

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