Blank Cover Image

Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon

Author(s):
Takai, M. ( Faculty of Engineering Science, Osaka University )
Sato, Y. ( Faculty of Engineering Science, Osaka University )
Murakami, K. ( The Institute of Material Science, University of Tsukuba )
Gamo, K. ( Faculty of Engineering Science, Osaka University )
Minamisono, T. ( Faculty of Science, Osaka University )
Namba, S. ( Faculty of Engineering Science, Osaka University )
1 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. date:
1982
Page(from):
91
Page(to):
96
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

Similar Items:

Lu, Y.F., Takai, M., Sanda, H., Chayahara, A., Satou, M., Minamisono, T., Namba, S.

Materials Research Society

Takai, M., Kinomura, A., Izumi, M, Matsunaga, K., Inoue, K., Gamo, K., Satou, M., Namba, S.

Materials Research Society

Takai, M., Izumi, M., Yamamoto, T., Kinomura, A., Gamo, K., Minasono, T., Namba, S.

Materials Research Society

8 Conference Proceedings Terawaft short-pulse CPA Nd:glass laser

Badziak,J., Chizhov,S.A., Kozlov,A.A., Makowski,J., Paduch,M., Tomaszewski,K., Vankov,A.B., Yashin,V.E.

SPIE-The International Society for Optical Engineering

Takai, M., Tanigawa, T., Gamo, K., Namba, S.

North-Holland

Takai, M., Kodama, Y., Tanigawa, T., Kobayashi, K., Gamo, K., Namba, S.

Materials Research Society

Takai, M., Tokuda, J., Nakai, H., Gamo, K., Namba, S.

North-Holland

Xu, Z., Gamo, K., Namba, S.

Materials Research Society

Tokuda, J., Takai, M., Gamo, K., Namba, S.

Materials Research Society

Baeri, P., Barbarino, A.E., Campisano, S.U., Grimaldi, M.G., Foti, G., Rimini, E.

North Holland

6 Conference Proceedings Ultra-short pulse laser annealing

Gamo, Kenji, Murakami, Kouichi, Kawabe, Mitsuo, Namba, Susumu, Aoyagi, Yoshinobu

North Holland

Kawashima,T., Kanzaki,T., Matsui,H., Kanabe,T., Yamanaka,M., Izawa,Y., Nakai,S., Matsui,K., Miyamoto,M., Kan,H., …

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12