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Physico-Chemical Basis of Laser Lithography

Author(s):
Metev M. S.  
Publication title:
Physical processes in laser-materials interactions
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
84
Pub. Year:
1983
Page(from):
503
Page(to):
518
Pages:
16
Pub. info.:
New York: PLENUM PRESS
ISBN:
9780306411076 [0306411075]
Language:
English
Call no.:
N11479/84
Type:
Conference Proceedings

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