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Epilayer Quality and Yield Improvement Using the Surface Charge Profiler as a Non-Destructive Technique

Author(s):
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3895
Pub. Year:
1999
Page(from):
408
Page(to):
418
Pub. info.:
Pennington, N.J.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434975 [0819434973]
Language:
English
Call no.:
P63600/3895
Type:
Conference Proceedings

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