Blank Cover Image

New COCOS Method for Monitoring the Reliability of Thin Gate Oxides

Author(s):
Wilson,M.
Lagowski,J.
Sartchouk,A.
Jastrzbski,L.
D'Alnico,J.
DeBusk,D.K.
Buczkowski,A.
2 more
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3895
Pub. Year:
1999
Page(from):
373
Page(to):
384
Pub. info.:
Pennington, N.J.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434975 [0819434973]
Language:
English
Call no.:
P63600/3895
Type:
Conference Proceedings

Similar Items:

Hoff,A.M., DeBusk,D.K., Schanzer,R.W.

SPIE - The International Society for Optical Engineering

Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Hoff,A.M., DeBusk,D.K.

SPIE - The International Society for Optical Engineering

Wilson, M., Lagowski, J., Savtchou, A., Marinskiy, D., Jastrzebski, L., D'Amico, J.

MRS-Materials Research Society

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

D'Amico,J., Jastrzebski,L., Wilson,M., Savtchouk,A.

SPIE - The International Society for Optical Engineering

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society

Marinskiy,D.N., Lagowski,J.J., Wilson,M., Jastrzebski,L., Santiesteban,R., Elshot,K.

SPIE-The International Society for Optical Engineering

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering

P. Edelman, A.M. Hoff, L. Jastrzebski, J. Lagowski

Society of Photo-optical Instrumentation Engineers

Marinskiy, D., Lagowski, J., Wilson, M., Savtchouk, A., Jastrzebski, L., DeBusk, D.

MRS-Materials Research Society

B. Shao, B.B. Li, C.H. Li, Y.L. Ma, Q. Zheng, D.L. Guo, D.M. Chen, J.C. Sun

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12