Blank Cover Image

Sequential COCOS and SPV Metrology and Its Application to IC Process Monitoring

Author(s):
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3895
Pub. date:
1999
Page(from):
351
Page(to):
364
Pub. info.:
Pennington, N.J.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434975 [0819434973]
Language:
English
Call no.:
P63600/3895
Type:
Conference Proceedings

Similar Items:

Hoff,A.M., DeBusk,D.K., Schanzer,R.W.

SPIE - The International Society for Optical Engineering

7 Conference Proceedings SCA and SPV in line monitoring

Barla,K., Levy,D., Fleury,A., Reynard,J.P., Kwakman,L.

SPIE-The International Society for Optical Engineering

Wilson,M., Lagowski,J., Sartchouk,A., Jastrzbski,L., D'Alnico,J., DeBusk,D.K., Buczkowski,A.

SPIE - The International Society for Optical Engineering

Lei, J.J., Sanie, M., Lay, D.K.H.

SPIE-The International Society for Optical Engineering

Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Mikhaylova, M., Kim, D.K., Toprak, M., Muhammed, M.

Materials Research Society

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering

P. Hung, T. Böscke, M. Wormington, D.K. Bowen, P. Lysaght

Electrochemical Society

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Jastrzebski, L., Henley, W., DeBusk, D., Haddad, N., Lowell, J., Wenner, V., Nauka, K., Persson, E.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12