Non-Contact Corona-Based Process Control Measurements:Where We've Been,Where We're Headed
- Author(s):
- Publication title:
- Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3895
- Pub. Year:
- 1999
- Page(from):
- 342
- Page(to):
- 350
- Pub. info.:
- Pennington, N.J.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434975 [0819434973]
- Language:
- English
- Call no.:
- P63600/3895
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
HST peer review: where we've been, where we are now, and possibly where the future lies
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
SATELLITE MEASUREMENTS OF SEA LEVEL CHANGE: WHERE HAVE WE BEEN AND WHERE ARE WE GOING
ESA Publications Division |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
5
Conference Proceedings
Characterization and Control of Copper/Barrier Chemical Mechanical Polishing In Damascene Processing Using Non-contact Capacitive Measurements
Electrochemical Society |
11
Conference Proceedings
Monitoring of radiation therapy response of head and neck tumors by non-invasive optical blood flow measurements [5859-17]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Two considerations for the design of a robust optimal smart structure where control energy is expensive
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |