Some aspects on the mechanical analysis of microshutters
- Author(s):
Fettig,R.K. ( Raytheon ITSS ) Kuhn,J.L. Moseley,S.H. Kutyrev,A.S. Orloff,J. Lu,S. - Publication title:
- Materials and Device Characterization in Micromachining II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3875
- Pub. Year:
- 1999
- Page(from):
- 210
- Page(to):
- 220
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434722 [0819434728]
- Language:
- English
- Call no.:
- P63600/3875
- Type:
- Conference Proceedings
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