Noncontact high-precision surface 3D profiler
- Author(s):
- Publication title:
- Rough surface scattering and contamination : 21-23 July 1999, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3784
- Pub. Year:
- 1999
- Page(from):
- 362
- Page(to):
- 369
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432704 [0819432709]
- Language:
- English
- Call no.:
- P63600/3784
- Type:
- Conference Proceedings
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