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Three-dimensional topography measurement with triangular beam scanning technique

Author(s):
Publication title:
Rough surface scattering and contamination : 21-23 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3784
Pub. Year:
1999
Page(from):
354
Page(to):
361
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432704 [0819432709]
Language:
English
Call no.:
P63600/3784
Type:
Conference Proceedings

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