Metal etch process defects
- Author(s):
- Lu,T.-Y. ( Taiwan Semiconductor Manufacturing Co. )
- Hwang,Y.-K.
- Lai,C.-H.
- Chen,S.-F.
- Chen,C.-H.
- Publication title:
- Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3742
- Pub. Year:
- 1999
- Page(from):
- 173
- Page(to):
- 179
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432223 [0819432229]
- Language:
- English
- Call no.:
- P63600/3742
- Type:
- Conference Proceedings
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