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Self-supporting tantalum masks for deep x-ray lithography with synchrotron radiation

Author(s):
Litvin,S.V. ( Research Institute of Semiconductor Devices )
Kanaev,V.G.
Larionova,E.G.
Glazunova,N.V.
Gromova,L.P.
Yurchenko,V.I.
Timchenko,N.A.
Mezentseva,L.A.
Nazmov,V.P.
Pindyurin,V.F.
5 more
Publication title:
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3676
Pub. Year:
1999
Vol.:
Part2
Page(from):
426
Page(to):
428
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431509 [0819431508]
Language:
English
Call no.:
P63600/3676
Type:
Conference Proceedings

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