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Production of SCALPEL masks in a commercial mask facility

Author(s):
Newport,C.L. ( DuPont Photomasks,Inc. )
Parker,J.
Smith,K.M.
Benveniste,A.
Kim,N.-W.
Reyland,D.
Farrow,R.C.
Novembre,A.E.
Kasica,R.J.
Knurek,C.S.
Peabody,M.L.
Rutberg,L.
7 more
Publication title:
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3676
Pub. Year:
1999
Vol.:
Part1
Page(from):
162
Page(to):
170
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431509 [0819431508]
Language:
English
Call no.:
P63600/3676
Type:
Conference Proceedings

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