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Process technologies of MPACVD planar waveguide devices and fiber attachment

Author(s):
Publication title:
Silicon-based optoelectronics : 27-28 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3630
Pub. Year:
1999
Page(from):
2
Page(to):
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431004 [0819431001]
Language:
English
Call no.:
P63600/3630
Type:
Conference Proceedings

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