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Fabrication of diffractive optical elements using the CMOS process

Author(s):
Chen,H. ( Industrial Technology Research Institute )
Huang,H.
Yen,K.
Chio,J.
Dai,C.
Chang,C.
Chang,P.
2 more
Publication title:
Optoelectronic Materials and Devices II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4078
Pub. Year:
2000
Page(from):
627
Page(to):
636
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437174 [0819437174]
Language:
English
Call no.:
P63600/4078
Type:
Conference Proceedings

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