Fabrication of diffractive optical elements using the CMOS process
- Author(s):
Chen,H. ( Industrial Technology Research Institute ) Huang,H. Yen,K. Chio,J. Dai,C. Chang,C. Chang,P. - Publication title:
- Optoelectronic Materials and Devices II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4078
- Pub. Year:
- 2000
- Page(from):
- 627
- Page(to):
- 636
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437174 [0819437174]
- Language:
- English
- Call no.:
- P63600/4078
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Design and fabrication of diffractive optical elements for use in solid state laser systems
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication and simulation of ultraviolet AIGalnN light-emitting diodes [6134-21]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Fabrication of gray-scale masks and diffractive optical elements with LDW glass
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Contact hole photo process improvement by multiple exposures with matched illumination settings
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Achromatization of the diffraction efficiency of diffractive optical elements
SPIE - The International Society for Optical Engineering |