Blank Cover Image

Reduction of wafer-scale error between DI and FI in multilevel metallization hy adjusting edge detedion method

Author(s):
Bae,S.-G. ( Hyundai Electronics Industries Co.,Ltd. )
Kim,Y.-K.
Park,K.-Y.
Kim,J.-S.
Lee,W.-G.
Lee,S.-W.
Lee,D.-H.
2 more
Publication title:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3998
Pub. date:
2000
Page(from):
460
Page(to):
469
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
Language:
English
Call no.:
P63600/3998
Type:
Conference Proceedings

Similar Items:

Kim,D.-J., Oh,S.-H., Yeo,G.-S., Bae,Y.-G., Kim,J.-H., Kim,Y.-H.

SPIE-The International Society for Optical Engineering

Kang, H. -J., Choi, Y., Kim, K., Park, I. -C., Kim, J. -W., Lee, E. -H., Gahang, G. -S.

SPIE - The International Society of Optical Engineering

Kim, Y-A., Kim, Y-I., Lee, K-W., Lee, S., Oh, K., Park, J-W., Sohn, S., Yang, S-H.

Materials Research Society

Shim, K.-C., Kim, M.-S., Lee, E.-S., Lee, C.-S., Gil, M.-G., Kim, B.-H., In, J.-S., Yoon, T.-B., Kim, J.-S.

SPIE-The International Society for Optical Engineering

Lee, C. H., Han, S., Park, K. S., Yoon, S., Kang, H. Y., Oh, H. W., Lee, J. E., Kim, Y. H., Kim, T. S., Oh, H.-K.

SPIE - The International Society of Optical Engineering

Bae,D., Bae,J.-S., Sung,S.-W., Park,J.-S., Rhie,S.-U., Shin,D.-W., Chung,T.-Y., Kim,K.

SPIE-The International Society for Optical Engineering

Jeong, H-D., Kim, H-G., Lee, S-H., Moon, D-K., Park, J-G.

Materials Research Society

Park, E.S., Lee, J.H,, Park, D.I., Jeong, W.-G., Seo, S.K., Kim, S.-S., Choi, S.-S., Jeong, S.-H.

SPIE-The International Society for Optical Engineering

Kim,Y.T., Kim,D.J., Lee,S., Park,Y.K., Kim,I.-S., Park,J.-W.

SPIE - The International Society for Optical Engineering

Bae, D. S., Kim, H. K., Kim, R. H., Kim, J. W., Lee, J. H., Park, S. W., Han, K. S.

Trans Tech Publications

Kim,D.-S., Jeong,J.-H., Nam,B.-H., Hwang,Y.J., Song,Y.J.

SPIE-The International Society for Optical Engineering

Park, Y.-G., Bae, K.-H., Lee, S.-T., Kim, E.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12