Blank Cover Image

Overlay-performance on tungsten CMP layers using the ATHENA alignment system

Author(s):
Rivera,G. ( STMicroelectronics )
Rozzoni,L.
Castellana,E.
Miraglia,G.
Lam,P.L.
Plauth,J.
Dunbar,A.
Phillips,M.
3 more
Publication title:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3998
Pub. Year:
2000
Page(from):
428
Page(to):
440
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
Language:
English
Call no.:
P63600/3998
Type:
Conference Proceedings

Similar Items:

Prasad,K.J., Rajan,D.A., Tan,Y.K., Sun,G.P., Morgan,S., Phillips,M., Ng,B.

SPIE-The International Society for Optical Engineering

Hsu,S.D., Dusa,M.V., Vlassak,J., Harker,C., Zimmerman,M.

SPIE-The International Society for Optical Engineering

Huijbregste, J., Haren, R.J.F., Jeunink, A., Hinnen, P.C., Swinnen, B., Navarro, R., Simons, G., Bilsen, F., Tolsma, H., …

SPIE-The International Society for Optical Engineering

Tan, C.-B., Yeo, S.-H., Koh, H.P., Koo, C.K., Foong, Y.M., Siew, Y.K.

SPIE-The International Society for Optical Engineering

Laidler, D., Megens, H.J., Lalbahadoersing, S., van Haren, R.J., Bornebroek, F.

SPIE-The International Society for Optical Engineering

Navarro,R., Keij,S., Boef,A.J.den, Schets,S., Bilsen,F.van, Simons,G., Schuurhuis,R., Burghoorn,J.

SPIE-The International Society for Optical Engineering

Yeo,J.-H., Nam,J.-L., Oh,S.-H., Moon,J.-T., Koh,Y.-B., Smith,N.P., Smout,A.M.

SPIE-The International Society for Optical Engineering

Pugh, G.M., Giorgi, M.R.

SPIE-The International Society for Optical Engineering

Reu, P.L., Chen, C.-F., Engelstad, R.L., Lovell, E.G., Lercel, M.J., Wood, O.R., II, Mackay, R.S.

SPIE-The International Society for Optical Engineering

11 Conference Proceedings CMP-compatible alignment strategy

Rouchouze,E., Darracq,J.-M., Gemen,J.

SPIE-The International Society for Optical Engineering

Hong,J., Joung,G., Yang,H., Park,J., Kim,J., Kim,B.

SPIE - The International Society for Optical Engineering

Jaap H. M. Neijzen, Robert D. Morton, Peter Dirksen, Henry J. L. Megens, Frank Bornebroek

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12