Shape control using sidewall imaging
- Author(s):
- Su,B. ( Applied Materials )
- Oshana,R.
- Menaker,M.
- Barak,Y.
- Shi,X.
- Publication title:
- Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3998
- Pub. Year:
- 2000
- Page(from):
- 232
- Page(to):
- 238
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436160 [081943616X]
- Language:
- English
- Call no.:
- P63600/3998
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry
Society of Photo-optical Instrumentation Engineers |
3
Conference Proceedings
Final CD control through slope/sidewall angle correlation with stepper defocus and electrical parametric
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
PERSPECTIVE ON THE USE OF GAS ADSORPTION FOR PARTICLE-SHAPE CONTROL IN SUPPORTED METAL CATALYSIS
Materials Research Society |
10
Conference Proceedings
Confocal microscopy of excised human skin using acetic acid and crossed polarization:rapid detection of nonmelanoma skin cancers
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Control of Edge Shape, Sidewall Profile, and Sidewall Roughness of the Plasma Etched Copper
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Fluoroscopy to ultrasound image registration using implanted seeds as fiducials during permanent prostate brachytherapy
SPIE - The International Society of Optical Engineering |