Blank Cover Image

Linewidth measurement intercomparison on a BESOI sample

Author(s):
Villarrubia,J.S. ( National Institute of Standards and Technology )
Vladar,A.E.
Lowney,J.R.
Postek,M.T.
Allen,R.A.
Cresswell,M.W.
Ghoshtagore,R.N.
2 more
Publication title:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3998
Pub. Year:
2000
Page(from):
84
Page(to):
95
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
Language:
English
Call no.:
P63600/3998
Type:
Conference Proceedings

Similar Items:

Villarrubia,J.S., Vladar,A.E., Lowney,J.R., Postek Jr.,M.T.

SPIE-The International Society for Optical Engineering

John S. Villarrubia, Ronald G. Dixson, Samuel N. Jones, Jeremiah R. Lowney, Michael T. Postek, Jr.

SPIE - The International Society of Optical Engineering

Villarrubia, J.S., Vladar, A.E., Lowney, J.R., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

Lowney,J.R., Vladar,A.E., Postek,M.T.

SPIE-The International Society for Optical Engineering

Postek,M.T., Vladar,A.E., Villarrubia,J.S.

SPIE - The International Society for Optical Engineering

Villarrubia, J.S., Vladar, A.E., Postek, M.T.

SPIE-The International Society for Optical Engineering

Allen,R.A., Ghoshtagore,R.N., Cresswell,M.W., Linholm,L.W., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering

Cresswell,M.W., Bonevich,J.E., Headley,T.J., Allen,R.A., Giannuzzi,L.A., Everist,S.C., Ghoshtagore,R.N., Shea,P.J.

SPIE - The International Society for Optical Engineering

Cresswell,M.W., Sniegowski,J.J., Ghoshtagore,R.N., Allen,R.A., Linholm,L.W., Villarrubia,J.S.

SPIE-The International Society for Optical Engineering

Damazo, B.N., Jayewardene, E.C., Keery, W.J., Vladar, A.E., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

Vladar, A.E., Villarrubia, J.S., Postek, M.T.

SPIE-The International Society for Optical Engineering

Vladar, A.E., Jayewardene, E.C., Damazo, B.N., Keery, W.J., Postek, M.T., Jr.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12