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AlN thin films prepared by reactive ion beam coating

Author(s):
Cheng, L. L.
Yu, Y. H.
Sundaravel, B.
Luo, E. Z.
Lin, S.
Lei, Y. M.
Ren. C. X.
Cheung, W. Y.
Wong, S. P.
Xu, J. B.
Wilson, I. H.
6 more
Publication title:
Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
585
Pub. Year:
2000
Page(from):
251
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994935 [1558994939]
Language:
English
Call no.:
M23500/585
Type:
Conference Proceedings

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