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Etching and surface smoothing with gas-cluster ion beams

Author(s):
Fenner, D. B.
Torti, R. P.
Allen, L. P.
Toyoda, N.
Kirkpatrick, A. R.
Greer, J. A.
DiFilippo, V.
Hautala, J.
3 more
Publication title:
Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
585
Pub. Year:
2000
Page(from):
27
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994935 [1558994939]
Language:
English
Call no.:
M23500/585
Type:
Conference Proceedings

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