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Modeling of PVT growth of bulk SiC crystals: General trends and 2" to 4" reactor scaling

Author(s):
Ramm, M. S.
Kulik, A. V.
Zhmakin, I. A.
Karpov, S. Yu.
Bord, O. V.
Demina, S. E.
Makarov. Yu. N.
2 more
Publication title:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
616
Pub. date:
2000
Page(from):
227
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995246 [1558995242]
Language:
English
Call no.:
M23500/616
Type:
Conference Proceedings

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