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Computational experiment of CVD of SiC: Growth rate, C/Si ratio, parasitic phase formation

Author(s):
Vorob'ev, Andrei N.
Komissarov, Alexandre E.
Bogdanov, Maxim V.
Karpov, Sergey Yu.
Bord, Olga V.
Zhmakin, Alexandre I.
Lovtsus, Andrei A.
Makarov, Yuri N.
3 more
Publication title:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
616
Pub. date:
2000
Page(from):
165
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995246 [1558995242]
Language:
English
Call no.:
M23500/616
Type:
Conference Proceedings

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