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Optimal design of reactors for metalorganic vapor phase epitaxy of group III nitrides

Author(s):
Pawlowski, R. P.
Theodoropoulos, C.
Mountziaris, T. J.
Moffat, H. K.
Han, J.
Thrush, E. J.
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Publication title:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
616
Pub. date:
2000
Page(from):
159
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995246 [1558995242]
Language:
English
Call no.:
M23500/616
Type:
Conference Proceedings

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