Comprehensive reactor-scale modeling of III-V ternary compound growth by MOVPE
- Author(s):
Yakovlev, E. V. Talalaev, R. A. Karpov, S. Yu. Shpolyanskiy, Yu. A. Makarov, Yu. N. Lowry, S. A. - Publication title:
- New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 616
- Pub. Year:
- 2000
- Page(from):
- 153
- Pub. info.:
- Warrendale, PA: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995246 [1558995242]
- Language:
- English
- Call no.:
- M23500/616
- Type:
- Conference Proceedings
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