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Surface and microstructural characterization of homoepitaxial silicon grown by pulsed laser deposition

Author(s):
Pelt, J. S.
Magana, R.Jr.
Ramsey, M. E.
Poindexter, E.
Atwell, S.
Zheng, J. P.
Durbin, S. M.
Kobayashi, M.
3 more
Publication title:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
616
Pub. Year:
2000
Page(from):
75
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995246 [1558995242]
Language:
English
Call no.:
M23500/616
Type:
Conference Proceedings

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