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Chemical vapor deposition coating for micromachines

Author(s):
Mani, S. S.
Fleming, J. G.
Sniegowski, J. J.
Boer, M. P. de
Irwin, L. W.
Walraven, J. A.
Tanner, D. M.
Dugger, M. T.
3 more
Publication title:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
616
Pub. date:
2000
Page(from):
21
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995246 [1558995242]
Language:
English
Call no.:
M23500/616
Type:
Conference Proceedings

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