Blank Cover Image

GROWTH OF MULTI-LAYER Si/Si1-xGex STRUCTURES USING RAPID THERMAL CHEMICAL VAPOUR DEPOSITION

Author(s):
Publication title:
Growth, processing, and characterization of semiconductor heterostructures : Symposium held November 29-December 2, 1993, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
326
Pub. Year:
1994
Page(from):
187
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992252 [1558992251]
Language:
English
Call no.:
M23500/326
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings LOW TEMPERATURE EPITAXIAL SILICON GROWTH IN A RAPID THERMAL PROCESSOR

McNeill, D. W., Gamble, H. S., Armstrong, B. M.

Materials Research Society
7 Conference Proceedings Low Temperature Bonding of PECVD Silicon Dioxide Layers

P.T. Baine, M. Bain, D.W. McNeill, H.S. Gamble, M. Armstrong

Electrochemical Society
2 Conference Proceedings Low-Temperature Epitaxy of Si/Si1-xGex/Si Multilayers by Low-Pressure RTCVD for Very Thin SOI Applications

McNeill, D. W., Gay, D. L., Li, X., Armstrong, B. M., Gamble, H. S.

MRS - Materials Research Society
8 Conference Proceedings Besoi using a Silicon Germanium Etch Stop

Li, X., Gay, D.L., McNeill, D.W., Armstrong, B.M., Gamble, H.S.

Electrochemical Society
3 Conference Proceedings Characterisation of SOI Thin Film Transistors Fabricated Using SiGe Etch Stop Layers

Uppal, S, Gay, D, Armstrong, G A, McNeill, D W, Baine, P, Armstrong, B M, Gamble, H S, Yallup, K

Electrochemical Society
9 Conference Proceedings LARGE-GRAIN POLYSILICON FILMS DEPOSITED BY RAPID THERMAL LPCVD

Mitchell, S. J. N., McNeil, D. W., Raza, S. H., Armstrong, B. M., Gamble, H. S.

Materials Research Society
4 Conference Proceedings GROWTH OF EPITAXIAL SILICON CARBIDE ON SILICON BY RAPID THERMAL LPCVD

Ruddell, F. H., Armstrong, B. M., Gamble, H. S.

Materials Research Society
10 Conference Proceedings Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.

Bain, M.F., Baine, P., McNeill, D.W., Srinivasan, G., Jankovic, N., McCartney, J., Moore, R.A., Armstrong, B.M., Gamble, …

Kluwer Academic Publishers
5 Conference Proceedings GROWTH AND PHOTOLUMINESCENCE OF STRAINED <110> Si/Si1-xGex/Si QUANTUM WELLS GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Liu, C. W., Sturm, J. C., Lacroix, Y. R. J., Thewalt, M. L. W., Perovic, D. D.

MRS - Materials Research Society
11 Conference Proceedings MISFIT DISLOCATION NUCLEATION SITES AND METASTABILITY ENHANCEMENT OF SELECTIVE Si1-xGex/Si GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Liu, C. W., Strum, J. C., Schwartz, P. V., Fitzgerald, E. A.

Materials Research Society
6 Conference Proceedings WELL-RESOLVED BAND-EDGE PHOTOLUMINESCENCE FROM STRAINED Si1-xGex LAYERS GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Sturm, J.C., Schwartz, P.V., Manoharan, H., Mi, Q., Lenchyshyn, L.C., Thewalt, M.L.W., Rowell. N.L., Noel, J.-P., …

Materials Research Society
12 Conference Proceedings Si AND GeSi1-x EPITAXIAL GROWTH ON SOI STRUCTURES BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION

Hseih, T. Y., Jung, K. H., Kwong, D. L., Lin, S., Marcus, H. L.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12