SELECTIVE AREA OMVPE GROWTH OF GaInP ON PATTERNED GaAs SUBSTRATES USING SEMIMETALLIC AMORPHOUS CARBON MASK

SELECTIVE AREA OMVPE GROWTH OF GaInP ON PATTERNED GaAs SUBSTRATES USING SEMIMETALLIC AMORPHOUS CARBON MASK

Author(s):

Publication title:

Growth, processing, and characterization of semiconductor heterostructures : Symposium held November 29-December 2, 1993, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

326

Pub. date:

1994

Page(from):

55

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992252 [1558992251]

Language:

English

Call no.:

M23500/326

Type:

Conference Proceedings

Details

TDL ID:	ZA00018465
Series ID:	PA00000011
Conf. info. (Name):	Symposium on growth, processing, and characterization of semiconductor heterostructures
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.02

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