TiOxCy THIN FILM DEPOSITION BY CO2+-ION BEAM SPUTTERING OF TITANIUM

TiOxCy THIN FILM DEPOSITION BY CO2+-ION BEAM SPUTTERING OF TITANIUM

Author(s):: Kempf, Bertilo E.
Publication title:: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 316
Pub. Year:: 1994
Page(from):: 917
Pub. info.:: Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:: 02729172
ISBN:: 9781558992153 [1558992154]
Language:: English
Call no.:: M23500/316
Type:: Conference Proceedings

Details

TDL ID:	ZA00018464
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials synthesis and processing using ion beams
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.03

Similar Items:

1 Conference Proceedings ION BEAM SPUTTER DEPOSITION OF REFRACTORY METAL OXIDES Kempf, B. E., Dinges, H. W., Pocker, A. MRS - Materials Research Society	7 Conference Proceedings Growth of Thin Films by UHV Ion Beam Sputtering Deposition Technique Pellet C., Schwebel C., Meyer F., Gautherin G. Martinus Nijhoff Publishers
2 Conference Proceedings Ion beam sputter deposition of zirconia thin films W. Jin, C. Jin, L. Liu, H. Zhu, H. Yang Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings COMPUTER SIMULATION OF SCATTERED ION AND SPUTTERED SPECIES EFFECTS IN ION BEAM SPUTTER-DEPOSITION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS Krauss, Alan R., Auciello, Orlando Materials Research Society
3 Conference Proceedings DEPOSITION OF CONDUCTIVE TITANIUM SUB-OXIDE FILMS BY REACTIVE ION-BEAM SPUTTERING Grigorov, K. G., Benhocine, A. H., Bouchier, D., Meyer, F. MRS - Materials Research Society	9 Conference Proceedings STUDIES ON ION SCATTERING AND SPUTTERING PROCESSES RELEVANT TO ION BEAM SPUTTER DEPOSITION OF MULTICOMPONENT THIN FILMS Auciello, O., Ameen, M.S., Krauss, A.R., Kingon, A.I., Ray, M.A. Materials Research Society
4 Conference Proceedings *ION BEAM SPUTTER DEPOSITION OF FERROELECTRIC OXIDE THIN FILMS Graettinger, Thomas M., Auciello, O., Ameen, M. S., Al-Shareef, H. N., Gifford, K., Kingon, A. I. Materials Research Society	10 Conference Proceedings HfO2 Thin Films Deposited On SOT by Ion Beam Enhanced Deposition Tao, K., Yu, Y. Electrochemical Society
5 Conference Proceedings Ion beam sputter deposition of TiNi shape memory alloy thin films Davies,S.T., Tsuchiya,K. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Cosputtering effect in titanium oxides by ion-beam sputtering deposition Hsu,J.-C., Lee,C.-C., Hwa,L.-G. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Dual ion beam sputtering deposition of silicon oxynitride thin films Sarto,F., Rizzo,A., Giorgi,R., Turtu,S., Scaglione,S. SPIE-The International Society for Optical Engineering	12 Conference Proceedings SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF Y-Ba-Cu-O THIN FILMS PRODUCED BY ION BEAM SPUTTER DEPOSITION Chapman, R.C., Auciello, O., Lichtenwalner, D.J., Adu, R.P., Soble II, C.N., Christensen, K.N., Woolcott, Jr., R.R., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12