Blank Cover Image

DEVELOPMENT OF AN ATOMIC OXYGEN SOURCE FOR THIN OXIDE FILM FORMATION

Author(s):
Publication title:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
316
Pub. Year:
1994
Page(from):
875
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992153 [1558992154]
Language:
English
Call no.:
M23500/316
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings FORMATION OF ALUMINUM FILMS USING A HIGH RATE ICB SOURCE

Tsukazaki, H., Okamoto, G., Hashimoto, Y., Yamanishi, K., Tanaka, M., Yasunaga, S.

Materials Research Society
7 Conference Proceedings HIGH-TEMPERATURE SUPERCONDUCTING Y-Ba-Cu-O THIN FILM BY USING IONIZED CLUSTER BEAM METHOD

Yamanishi, K., Yasunaga, S., Imada, K., Sato, K., Hashimoto, Y.

Materials Research Society
2 Conference Proceedings Atomic Layer Deposition of Metal Oxide Films by using Metal Alkoxides as an Oxygen Source

Raeisaenen, P.I., Kukli, K., Rahtu, A., Ritala, M., Leskela, M.

Electrochemical Society
8 Conference Proceedings Source of Atomic Oxygen and its Application to Material Oxidation

Pointu,A.M., Touzeau,M., Guymont,O.

Trans Tech Publications
3 Conference Proceedings Development of High Purity One ATM Ozone Source-Its Application to Ultrathin SiO2 Film Formation on Si Substrate

Koike, K., Inoue, G., Ichimura, S., Nakamura, K., Kurokawa, A., Nonaka, H.

MRS - Materials Research Society
9 Conference Proceedings Ultra-low k1 oxide contact hole formation and metal filling using resist contact hole pattern by double L&S formation method

H. Nakamura, M. Omura, S. Yamashita, Y. Taniguchi, J. Abe, S. Tanaka, S. Inoue

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Mechanical Properties of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films Prepared by Dual Source DC Sputtering

S. Inoue, T. Namazu, T. Fujimoto, K. Koterazawa, K. Inoue

Trans Tech Publications
10 Conference Proceedings Control of the Crystal Phase in Fe/Si Films by Using Thin Film Zone Melting Crystallization

T. Inoue, T. Shinsuke, Y. Tanaka, M. Ihara

Electrochemical Society
5 Conference Proceedings Effect of buffer electrodes in crystallization of zinc oxide thin film for thin film bulk acoustic wave resonator

Yoshino, Y., Tsukai, N., Inoue, K., Takeuchi, M., Nomura, T., Makino, T., Arai, S., Hata, T.

MRS-Materials Research Society
11 Conference Proceedings FORMATION OF TiO2 THIN FILMS BY OXIDATION OF TiN

Truman, J.K., Ballentine, P.H., Terzioglu, E., Kadin, A.M.

Materials Research Society
6 Conference Proceedings OXIDATION KINETICS OF YBa2Cu3O7-x THIN FILMS IN THE PRESENCE OF ATOMIC OXYGEN AND MOLECULAR OXYGEN BY IN-SITU RESISTIVITY MEASUREMENT

Yamamoto, K., Lairson, B. M., Bravman, J. C., Geballe, T. H.

Materials Research Society
12 Conference Proceedings Ultrathin Oxide Film Formation Using Radical Oxygen in a UHV System

Watanabe, K., Kimura, S., Tatsumi, T.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12