Blank Cover Image

DEFECT PAIR FORMATION BY IMPLANTATION-INDUCED STRESSES IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL

Author(s):
Publication title:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
316
Pub. Year:
1994
Page(from):
753
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992153 [1558992154]
Language:
English
Call no.:
M23500/316
Type:
Conference Proceedings

Similar Items:

Park, J.C., Lee, J.D., Venables, D., Krause, S., Roitman, P.

Materials Research Society

Krause, S.J., Seraphin, S., Chen, B.L., Cordts, B., Roitman, P.

Materials Research Society

Visitserngtrakul, S., Jung, C. O., Cordts, B. F., Roitman, P., Krause, S. J.

Materials Research Society

Visitserngtrakul, S., Barry, J., Krause, S.

Materials Research Society

Lee, J. D., Park, J. C., Krause, S. J., Roitman, P., El-Ghor, M. K.

Materials Research Society

Bagchi, S, Lee, J D, Krause, S J, Roiman, P

Electrochemical Society

Lee, J.D., Park, J.C., Krause, S.J., Venables, D., Roitman, P.

Electrochemical Society

Roitman, P., Mayo, S., Simons, D., Krause, S.J., Venables, D., Park, J.C., Lee, J.D., Lenahan, P., Conley, J.

Electrochemical Society

Venables, D., Jones, K. S., Namavar, F., Manke, J. M.

Materials Research Society

Visitserngtrakul, S., Cordts, B.F., Krause, S.

Materials Research Society

Krause, S. J., Jung, C. O., Ravi, T. S., Wilson, S. R., Burke, D. E.

Materials Research Society

Liu, J. B., Iyer, S. S. K., Min, J., Chu, P., Gronsky, R., Hu, C., Cheung, N. W.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12