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ORIENTED Si AND Ge NANOCRYSTALS FORMED IN Al2O3 BY ION IMPLANTATION AND ANNEALING

Author(s):
White, C. W.
Budai, J. D.
Withrow, S. P.
Pennycook, S. J.
Hembree, D. M.
Zhou, D. S.
Vo-Dinh, T.
Magruder, R. H.
3 more
Publication title:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
316
Pub. date:
1994
Page(from):
487
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992153 [1558992154]
Language:
English
Call no.:
M23500/316
Type:
Conference Proceedings

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