CHARACTERIZATION OF CAPILLARY-OPTIC MATERIALS FOR USE IN X-RAY LITHOGRAPHY

CHARACTERIZATION OF CAPILLARY-OPTIC MATERIALS FOR USE IN X-RAY LITHOGRAPHY

Author(s):

Dozier, C. M.

Publication title:

Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

306

Pub. Year:

1993

Page(from):

169

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992023 [1558992022]

Language:

English

Call no.:

M23500/306

Type:

Conference Proceedings

Details

TDL ID:	ZA00018463
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials aspects of x-ray lithography
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.12-1993.04.14

Similar Items:

1 Conference Proceedings X-ray spectral measurements of the JMAR high-power laser-plasma source Whitlock, R.R., Dozier, C.M., Newman, D.A., Turcu, I.C.E., Gaeta, C.J., Cassidy, K.L., Powers, M.F., Kleindolph, T., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings X-ray spectral measurements of a dense plasma focus Whitlock, R.R., Dozier, C.M., Newman, D.A., Petr, R.A., Freshman, J., Hoey, D.W., Heaton, J. SPIE-The International Society for Optical Engineering
2 Conference Proceedings X-ray characterization of the Capillary System Haba, Y., Iizuka, R., Hayakawa, A., Misaki, K., Shibata, R., Itoh, K., Mori, H., Maeda, Y., Ishida, M., Kunieda, H. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Capillary xray compressor: principle versus practice D.L. Brewe, S.M. Heald, B. Barg, F.C. Brown, K.H. Kim Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Characterization of x-ray streak cameras hor use on Nova Kalantar,D.H., Bell,P.M., Costa,R.L., Hammei,B.A., Landen,O.L., Orzechowski,T.J., Hares,J.D., Dymoke-Bradshaw,A.K.L. SPIE-The International Society for Optical Engineering	9 Conference Proceedings MATERIALS ISSUES IN X-RAY LITHOGRAPHY Dobisz, E. A., Peckerar, M. C., Chu, W., Rhee, K., Shirey, L. S., Marrian, C. R. K., Salvino, R. E., Foster, K., … MRS - Materials Research Society
4 Conference Proceedings Analysis of capillary optic performance for hard x rays Wang,L., Rath,B.K., Gibson,W.M., Kimball,J.C., MacDonald,C.A. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Thermo-optic switches using sol-gel processed hybrid materials Kribich, K.R., Barry, H., Copperwhite, R., Kolodziejczyk, B., O'Dwyer, K., Sabattie, J.-M., MacCraith, B.D. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Capillary concentrators for synchrotron radiation beamlines Heald,S.M., Brewe,D.L., Kim,K.H., Brown,F.C., Barg,B., Stern,E.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Characterization of Certain Acousto-Optic Materials McCarthy,K.A., Sample,H.H., Koss,M.B. Trans Tech Publications
6 Conference Proceedings CHARACTERIZATION OF MULTILAYERS AS X-RAY DISPERSION DEVICES Gilfrich, John V., Brown, Dennis B., Rosen, David L., Freitag, Ralph K. Materials Research Society	12 Conference Proceedings 90-nm lithography process characterization using ODP scatterometry technology Ke, C.-M., Yu, S.-S., Wang, Y.-H., Chou, Y.-J., Chen, J.-H., Lee, B.-H., Chu, H.-Y., Lin, H.-T., Gau, T.-S., Lin, C.-H., … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12