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Investigations of the Chemical-Mechanical Polishing of Polymer Films for ILD Applications

Author(s):
Publication title:
Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
381
Pub. Year:
1995
Page(from):
229
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992849 [1558992847]
Language:
English
Call no.:
M23500/381
Type:
Conference Proceedings

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