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Integration of BPDA-PDA Polyimide with Two Levels of Al(Cu) Interconnects

Author(s):
Weltzel, J. T.
Lii, Y. T.
Filipiak, S. M.
Nguyen, B. -Y.
Travis, E. O.
Fiordalice, R. W.
Winkler, M. E.
Lee, C. C.
Peschke, J.
4 more
Publication title:
Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
381
Pub. Year:
1995
Page(from):
217
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992849 [1558992847]
Language:
English
Call no.:
M23500/381
Type:
Conference Proceedings

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