H-Atom Assisted Jet Vapor Deposition of Parylene-N Polymer
- Author(s):
Halpern, B. L. Komarenko, P. Graves, R. F. Fuqua, P. D. McDonald, J. F. Yang, G-R. Wang, L. Lu, T. M. Tomozawa, M. Matthew, I. - Publication title:
- Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 544
- Pub. Year:
- 1999
- Page(from):
- 153
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994508 [1558994505]
- Language:
- English
- Call no.:
- M23500/544
- Type:
- Conference Proceedings
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