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Analysis of SiGe FET Device Structures on Silicon-on-Sapphire Substrates by X-ray Diffraction

Author(s):
Mooney, P. M.
Chu, J. O.
Ott, J. A.
Jordan-Sweet, J. L.
Dubbelday, W. B.
Kavanagh, K. L.
Lagnado, I.
Meyerson, B. S.
3 more
Publication title:
Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
533
Pub. Year:
1998
Page(from):
55
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994393 [1558994394]
Language:
English
Call no.:
M23500/533
Type:
Conference Proceedings

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