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Toward rf System-Level Integration: Process Integration Issues in SiGe BiCMOS

Author(s):
Freeman, G.
Schonenberg, K.
Ahlgren, D.
Jeng, S-J.
Nguyen-Ngoc, D.
Stein, K.
Colavito, D.
Subbanna, S.
Harame, D.
Meyerson, B.
5 more
Publication title:
Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
533
Pub. Year:
1998
Page(from):
19
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994393 [1558994394]
Language:
English
Call no.:
M23500/533
Type:
Conference Proceedings

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