EPR Study of the Role of Hydrogen in the Defect Formation Upon Heat Treatment of Oxidized SiC

EPR Study of the Role of Hydrogen in the Defect Formation Upon Heat Treatment of Oxidized SiC

Author(s):

Publication title:

Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

513

Pub. Year:

1998

Page(from):

433

Pub. info.:

Warrendale, Penn.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994195 [155899419X]

Language:

English

Call no.:

M23500/513

Type:

Conference Proceedings

Details

TDL ID:	ZA00018457
Series ID:	PA00000011
Conf. info. (Name):	Symposium on hydrogen in semiconductors and metals
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.13-1998.04.17

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