Blank Cover Image

Thermal Desorption of Hydrogen in Si and SiC Nanoparticles Produced by Plasma-Enhanced Chemical Vapor Deposition

Author(s):
Costa, J.
Fort, J.
Sunol, J. J.
Roura, P.
Viera, G.
Bertran, E.
1 more
Publication title:
Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
513
Pub. Year:
1998
Page(from):
427
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994195 [155899419X]
Language:
English
Call no.:
M23500/513
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Thermal Oxidation Of Si Nanoparticles Grown By Plasma-Enhanced CVD

Bertran, E., Costa, J., Das, D., Farjas, J., Roura, P., Viera, G.

Materials Research Society
7 Conference Proceedings Hydrogen Assisted Remote Plasma Enhanced Chemical Vapor Deposition of Amorphous Silicon Nitride Films

Santos-Filho, P., Koh, K., Stevens, G., Lucovsky, G.

MRS - Materials Research Society
2 Conference Proceedings Thermal Stabilization And Crystallization Of Nanometric Particles Of Si-C-N Produced By RF-Plasma Enhanced Chemical-Vapor-Deposition

Bertran, E., Farjas, J., Garcia-Caurel, E., Polo, M. C., Roura, P., Viera, G.

Materials Research Society
8 Conference Proceedings Enhancing Hydrogen Adsorption by Metal Incorporation in Carbon Multi-Wall Nanotubes Produced by Continuous Hot Wire Chemical Vapor Deposition

Dillon, A.C., Parilla, P.A., Alleman, J.L., Mahan, A.H., Gilbert, K.E.H., Jones, K.M., Heben, M.J.

Materials Research Society
3 Conference Proceedings Deposition of Nanostructured Silicon Thin Films by Means of the Selective Contribution of Particles in PECVD

Costa, J., Roura, P., Cabarrocas, P. Roca i, Viera, G., Bertran, E.

MRS - Materials Research Society
9 Conference Proceedings Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y., Lin, J., Feng, Z. C., Chua, S. J., Alfred, C. H. H.

Trans Tech Publications
4 Conference Proceedings Structural Characterization and Crystallization Process of Nanostructured Silicon Thin Films Produced in Low-Pressure Silane Plasma

Viera, G., Cabarrocas, P. Roca i, Costa, J., Martinez, S., Bertran, E.

MRS - Materials Research Society
10 Conference Proceedings Thermal Plasma Chemical Vapor Deposition

Heberlein,J., Pfender,E.

Trans Tech Publications
5 Conference Proceedings IR-VISIBLE PHOTOLUMINESCENCE STUDY OF NANOMETER-SIZE AMORPHOUS SILICON POWDER PRODUCED BY SQUARE-WAVE-MODULATED RF GLOW DISCHARGE

Costa, J., Roura, P., Sardin, G., Morante, J. R., Bertran, E.

MRS - Materials Research Society
11 Conference Proceedings DEPOSITION OF GaN BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION (Remote PECVD)

Choi, S.W., Bachmann, K.J., Lucovsky, G.

Materials Research Society
6 Conference Proceedings Bonding of Hydrogen and Deuterium in Silicon Nitride Films Prepared by Remote Plasma Enhanced Chemical Vapor Deposition

Stevens, G., Santos-Filho, P., Habermehl, S., Lucovsky, G.

MRS - Materials Research Society
12 Conference Proceedings Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature

G. Pareschi, G. Taglioni, S. Basso, O. Citterio, V. De Caprio

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12