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MOCVD of Alkaline Earth Titanates for Integrated rf Capacitors

Author(s):
Publication title:
Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
493
Pub. date:
1998
Page(from):
503
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993983 [1558993983]
Language:
English
Call no.:
M23500/493
Type:
Conference Proceedings

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