MOCVD of SrBi2Ta2O9 for Integrated Ferroelectric Capacitors | 東京工業大学附属図書館文献データベース

Blank Cover Image

MOCVD of SrBi2Ta2O9 for Integrated Ferroelectric Capacitors

Author(s):

Hendrix, Bryan C.

Hintermaier, Frank

Desrochers, Debra A.

Roeder, Jeffrey F.

Bhandari, Gautam

Chappuis, Maggie

Baum, Thomas H.

Buskirk, Peter C. Van

Dehm, Christine

Honlein, Wolfgang

Publication title:

Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

493

Pub. Year:

1998

Page(from):

225

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993983 [1558993983]

Language:

English

Call no.:

M23500/493

Type:

Conference Proceedings

Details

TDL ID:	ZA00018455
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	6th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.11.30-1997.12.04

Similar Items:

1 Conference Proceedings Correlations Between Composition, Texture, and Polarization in SrxBiyTa2O5+x+3y/2 Thin Films Deposited by MOCVD Hendrix, B. C., Hintermaier, F., Desrochers, D. A., Roeder, J. F., Baum, T. H., Dehm, C., Nagel, N., Honlein, W., … MRS - Materials Research Society	7 Conference Proceedings An Overview of FERAM Technology for High Density Applications Nagel, Nicolas, Mikolajick, Thomas, Kasko, Igor, Hartner, Walter, Moert, Manfred, Pinnow, Cay-Uwe, Dehm, Christine, … Materials Research Society
2 Conference Proceedings MOCVD of Nb substituted SrBi2TaO9 for integrated ferroelectric capacitors Hendrix, B. C., Classman, T. E., Roeder, J. F. MRS-Materials Research Society	8 Conference Proceedings Origin of Imprint in Ferroelectric CSD SrBi2Ta2O9 Thin Films Grossmann, M., Lohse, O., Bolten, D., Waser, R., Hartner, W., Schindler, G., Nagel, N., Dehm, C. MRS - Materials Research Society
3 Conference Proceedings Evidence for Cooperative Oxidation of MOCVD Precursors Used in BaxSr1-xTiO3 Film Growth Glassman, Timothy E., Bhandari, Gautam, Baum, Thomas H. MRS - Materials Research Society	9 Conference Proceedings Novel Antimony Precursors for Low-Temperature CVD of Antimonide Thin Films Todd, Michael A., Bhandari, Gautam, Baum, T. H. MRS - Materials Research Society
4 Conference Proceedings Effect of film composition of low-temperature processing of SBT deposited by MOCVD Bachhofer, Harald, Hintermaier, Frank, Hauf, Manfred, Spindler, Oswald, Haneder, Thomas, Dehm, Christine, Philipsborn, … MRS-Materials Research Society	10 Conference Proceedings Scanning Probe Microscopy (SPM) for the Investigation of Local Electrical Properties of High-K Dielectric/Ferroelectric Films Landau, S. A., Weiss, P-A., Junghans, N., Kolbesen, B. O., Adderton, D., Schindler, G., Hartner, W., Hintermaier, F., … MRS - Materials Research Society
5 Conference Proceedings MOCVD of Polycrystalline and Epitaxial Complex Oxides by Liquid Delivery Roeder, J. F., Bilodeau, S. M., Carl, R. J., Baum, T. H., Buskirk, P. C. Van, Woolcott, R. R., Jr., Kingon, A. I. MRS - Materials Research Society	11 Conference Proceedings Low Temperature Process for High Density Thin Film Integrated Capacitors Hendrix,Bryan C., Stauf,Gregory T. IMAPS, SPIE-The International Society for Optical
6 Conference Proceedings Comparison Of MOCVD Precursors For Hf1-xSixO2 Gate Dielectric Deposition Hendrix, B.C., Borovik, A.S., Wang, Z., Xu, C., Roeder, J.F., Baum, T.H., Bevan, M.J., Visokay, M.R., Chambers, J.J., … Materials Research Society	12 Conference Proceedings Liquid Delivery MOCVD of Ferroelectric PZT Roeder, J. F., Vaartstra, B. A., Buskirk, P. C. Van, Beratan, H. R. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12