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A Novel Technique for RTP Annealing of Compound Semiconductors

Author(s):
Fu, M.
Sarvepalli, V.
Singh, R. K.
Abernathy, C. R.
Cao, X.
Pearton, S. J.
Sekhar, J. A.
2 more
Publication title:
Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
483
Pub. date:
1998
Page(from):
345
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993884 [1558993886]
Language:
English
Call no.:
M23500/483
Type:
Conference Proceedings

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