Blank Cover Image

The Effect of Ti Interlayer on the Hillock Formation of Al-0.5 wt%Cu Films on the TiN/Ti/SiO2/Si Multilayer Structure

Author(s):
Publication title:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
473
Pub. Year:
1997
Page(from):
421
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993778 [1558993770]
Language:
English
Call no.:
M23500/473
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Effect of Ar Sputtering Pretreatment on the Electromigration Resistance in Al-Cu/TiN/Ti Interconnects

Wang, L. P., Chuang, A., Lin, L. T., Huang, F. S., Perng, K., Hwang, J.

MRS - Materials Research Society
7 Conference Proceedings Structure and Performance of Ti/TiN/PbO2 Electrodes with Plasma-Sprayed TiN Interlayer

Huang, Amin, Zhang, Jian Xin, Wu, Xiao Wen, Wang, Yang

Trans Tech Publications
2 Conference Proceedings Formation of AIN Films on Ti/TiN Arc-Layer Interface With Al-0.5%Cu Interconnects Evaluated by XPS and Energy-Filtered-TEM

Gazda, J., Smith, P., White, R. A., Zhao, J.

Materials Research Society
8 Conference Proceedings FORMATION ON GERMANIUM DIOXIDE DURING WET OXIDATION OF Si0.5Ge0.5 ALLOY

Zhang, J. P., Hemment, P. L. F., Kubiak, R. A., Parker, E. H. C.

MRS - Materials Research Society
3 Conference Proceedings Stress-Temperature Behavior and Stress Relaxation in Ti/Al-0.5%Cu/TiN and TiN/W Thin Films

Doucet, L., Brun, A., Jaouen, H., Dupeux, M., Ignat, M.

MRS - Materials Research Society
9 Conference Proceedings Crystallographic Texture and Phase Formation in Blanket Ti/TiN/AlCu Films

DeHaven, P. W., Clevenger, L. A., Schnabe, R. F., Weber, S. J., Iggulden, R. C., Rodbell, K. P.

MRS - Materials Research Society
4 Conference Proceedings In Situ X-ray Microbeam Cu Fluorescence and Strain Measurements on Al(0.5 at.% Cu) Conductor Lines During Electromigration

Kao, H-K., Cargill, G. S., III., Hwang, K. J., Ho, A. C., Wang, P-C., Hu, C-K.

MRS - Materials Research Society
10 Conference Proceedings Mechanically Alloyed (Fe0.5Cu0.5)100-xZrx Alloys

Crespo, P., Marin, P., Agudo, P., Alocen, M.C., Hernando, A., Garcia-Escorial, A., Eckert, J., Roth, S., Schultz, L.

Trans Tech Publications
5 Conference Proceedings HIGH RESOLUTION ELECTRON MICROSCOPY OBSERVATIONS ABOUT THE INTERFACE STRUCTURE IN A Ti/TiN MULTILAYER MATERIAL

Ning, X. G., Guo, L. P., Huang, R. F., Gong, J., Yu, B. H., Wen, L. S., Ye, H. Q.

Materials Research Society
11 Conference Proceedings Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing

Cheng,S.D, Kam,C.H., Zhou,Y., Lam,Y.L., Chan,Y.C., Gan,W.S.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings The Stress State and Domain Structure of Epitaxial PbZr0.2Ti0.8O3 Films on (001) SrTiO3 With and Without La0.5Sr0.5CoO3 Electrode Layer

Alpay, S. P., Nagarajan, V., Bendersky, L. A., Vaudin, M. D., Aggarwal, S., Ramesh, R., Roytburd, A. L.

MRS - Materials Research Society
12 Conference Proceedings PREPARATION AND GROWTH OF Pb2Sr2Y0.5Ca0.5Cu308+δ THIN FILM SUPERCONDUCTORS

Naqvi, S.H.H., Vickers, M., Tarling, S., Barnes, P., Boyd, I.W.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12