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Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials

Author(s):
Saito, S.
Hamada, K.
Eaglesham, D. J.
Shiramizu, Y.
Benton, J. L.
Kitajima, H.
Jacobson, S. D. C.
Poate, J. M.
3 more
Publication title:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
473
Pub. Year:
1997
Page(from):
141
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993778 [1558993770]
Language:
English
Call no.:
M23500/473
Type:
Conference Proceedings

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