Blank Cover Image

Adhesion Assessment of Copper Thin Films

Author(s):
Publication title:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
473
Pub. Year:
1997
Page(from):
39
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993778 [1558993770]
Language:
English
Call no.:
M23500/473
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Quantitative Measurement of the Effect of Annealing on the Adhesion of Thin Copper Films Using Superlayers

Kriese, M. D., Moody, N. R., Gerberich, W. W.

MRS - Materials Research Society
7 Conference Proceedings *A brittle to ductile transition (BDT) in adhered thin films

Gerberich, W. W., Volinsky, A. A., Tymiak, N. I., Moody, N. R.

MRS-Materials Research Society
2 Conference Proceedings Experimental Considerations for Indentation-Induced Adhesion Measurement of Multilayered Thin Films

Kriese, M. D., Moody, N. R., Gerberich, W. W.

MRS - Materials Research Society
8 Conference Proceedings Interface Structure Effects on the Fracture of Hard Thin Films

Moody,N.R., Strojny,A., Medlin,D., Schneider,J., Talin,A., Gerberich,W.W.

Trans Tech Publications
3 Conference Proceedings Quantitative Modelling and Measurement of Copper Thin Film Adhesion

Volinsky, A. A., Tymiak, N. I., Kriese, M. D., Gerberich, W. W., Hutchinson, J. W.

MRS - Materials Research Society
9 Conference Proceedings Test Rate Effects on the Mechanical Behavior of Thin Aluminum Films

Moody, N. R., Strojny, A., Medlin, D., Guthrie, S., Gerberich, W. W.

MRS - Materials Research Society
4 Conference Proceedings *Annealing effects on interfacial fracture of gold-chromium films in hybrid microcircuits

Moody, N. R., Adams, D. P., Volinsky, A. A., Kriese, M. D., Gerberich, W. W.

MRS-Materials Research Society
10 Conference Proceedings INTERFACE ROUGHNESS EFFECTS ON ADHESION OF Ta2N FILMS

Moody, N. R., Venkataraman, S., Nelson, J., Worobey, W., Gerberich, W. W.

MRS - Materials Research Society
5 Conference Proceedings Effect of Carbon on the Adhesion of Aluminum Films to Sapphire Substrates

Schneider, J. A., Guthrie, S. E., Kriese, M. D., Clift, W. M., Moody, N. R.

MRS - Materials Research Society
11 Conference Proceedings Mechanical properties and adhesion of PZT thin films for MEMS

Jungk, J. M., Crozier, B. T., Bandyopadhyay, A., Moody, N. R., Bahr, D. F.

MRS-Materials Research Society
6 Conference Proceedings THIN FILM FINE LINE WORK OF ADHESION BY MICROWEDGE INDENTATION

Boer, M. P. de, Moody, N. R., Huang, H., Gerberich, W. W.

MRS - Materials Research Society
12 Conference Proceedings HYDROGEN EFFECTS ON THE FRACTURE OF THIN TANTALUM NITRIDE FILMS

Moody, N. R., Venkataraman, S. K., Bastasz, B., Angelo, J. E., Gerberich, W. W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12