Microwave Annealing of Ion Implanted 6H-SiC
- Author(s):
Gardner, J. A. Rao, M. V. Tian, Y. L. Holland, O. W. Kelner, G. Freitas, J. A., Jr. Ahmad, I. - Publication title:
- Microwave processing of materials V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 430
- Pub. Year:
- 1996
- Page(from):
- 641
- Pub. info.:
- Pittsburgh,, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993334 [1558993339]
- Language:
- English
- Call no.:
- M23500/430
- Type:
- Conference Proceedings
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